Integrated micro-electro-mechanical sensor development for inertial applications

J.J. Allen, R.D. Kinney, J. Sarsfield, M.R. Daily, J.R. Ellis, J.H. Smith, S. Montague, R.T. Howe, B.E. Boser, R. Horowitz, A.P. Pisano, M.A. Lemkin (+2 others)
IEEE 1998 Position Location and Navigation Symposium (Cat. No.98CH36153)  
Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper will describe the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.
doi:10.1109/plans.1998.669863 fatcat:tgqrtdny5jemfptg2obnj2bkvu