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J211022 Anisotropy of Cu/SiN interface toughness induced by copper crystal plasticity
J211022 銅結晶塑性に起因するCu/SiN界面じん性値の異方性([J211-02]"壊れない"マイクロシステムのためのナノ力学・ナノ計測(2))

Chuantong CHEN, Nobuyuki SHISHIDO, Kozo KOIWA, Shoji KAMIYA, Masaki OMIYA, Hisashi SATO, Masahiro NISHIDA, Takashi SUZUKI, Tomoji NAKAMURA, Toshiaki SUZUKI, Takeshi NOKUO
2013 The Proceedings of Mechanical Engineering Congress Japan  

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doi:10.1299/jsmemecj.2013._j211022-1 fatcat:bx7pr7lekndttk3cfzehivrm7y
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Chuantong CHEN, Nobuyuki SHISHIDO, Kozo KOIWA, Shoji KAMIYA, Masaki OMIYA, Hisashi SATO, Masahiro NISHIDA, Takashi SUZUKI, Tomoji NAKAMURA, Toshiaki SUZUKI, Takeshi NOKUO. "J211022 Anisotropy of Cu/SiN interface toughness induced by copper crystal plasticity." The Proceedings of Mechanical Engineering Congress Japan 2013.0 (2013) _J211022-1-_J211022-4