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Crystal structure and piezoelectric properties of hydrothermally deposited (K,Na,Li)NbO3 epitaxial thick films
2022
Journal of the Ceramic Society of Japan
Epitaxial films of (K,Na,Li)NbO 3 with 10 ¯m thickness and various Li contents were fabricated at 240 °C on (001)La:SrTiO 3 substrates by a hydrothermal method, and their crystal structures and piezoelectric properties were investigated. The film thickness was controlled by varying the deposition time (up to 3.5 h) and the number of deposition cycles. Scanning electron microscopy observations showed that dense thick films were formed. X-ray diffraction (XRD) measurements showed that {001} c
doi:10.2109/jcersj2.22029
fatcat:w7rzqn2ronfg7br47ieau2ebrm