Zum Einfluss von Polarisationseffekten in der mikroskopischen Bildentstehung [article]

Norbert Kerwien, Universität Stuttgart, Universität Stuttgart
2008
This thesis investigates polarization effects in spatially resolved high resolution optical metrology and uses the principles of model-based object reconstruction to reveal structure features in the subwavelength range. Because of the close interrelation between the electromagnetic light-object interaction and the vector nature of light, polarization takes up a key role for the development of new metrology strategies in optical imaging. Different structures varying in the subwavelength range
more » ... wavelength range imprint characteristic features to the partially polarized light field. This can be used for object reconstruction from a microscopic image. The tight interconnection between modeling and simulation on the one hand and polarimetric measurement techniques on the other hand defines the structure of this thesis. Besides describing the theoretical basis of electromagnetic image simulation, the development of a simplified diffraction model is presented as well as polarization optical experiments and a methodical study of polarization signatures. This thesis separates into three parts: a theoretical part, an experimental part and a methodical part. Based on each other they provide the numerical and experimental tools to exploit the polarization transfer of micro- and nanostructures for metrological purposes. The first part (chapter 1-5) describes the theoretical basis of incorporating electromagnetic interaction processes into microscopic image simulation. With regard to the theory of optical imaging, there exists a multitude of excellent textbooks, which treat imaging on the foundation of scalar Fourier-Optics – especially in paraxial approximation. In this formalism the object is described by a scalar transfer function, and electromagnetic effects of light-sample interaction are not considered. Also, plenty of publications on focusing of electromagnetic fields with high numerical aperture have been published, which take vector effects of interference and the conservation of energy explicitly into account. Nevertheless there curre [...]
doi:10.18419/opus-4130 fatcat:27mulsrzfrbhpjc6pziqkbq6vy