Design and fabrication of silicon photonic crystal optical waveguides

M. Loncar, T. Doll, J. Vuckovic, A. Scherer
2000 Journal of Lightwave Technology  
We have designed and fabricated waveguides that incorporate two-dimensional (2-D) photonic crystal geometry for lateral confinement of light, and total internal reflection for vertical confinement. Both square and triangular photonic crystal lattices were analyzed. A three-dimensional (3-D) finite-difference timedomain (FDTD) analysis was used to find design parameters of the photonic crystal and to calculate dispersion relations for the guided modes in the waveguide structure. We have
more » ... a new fabrication technique to define these waveguides into silicon-on-insulator material. The waveguides are suspended in air in order to improve confinement in the vertical direction and symmetry properties of the structure. High-resolution fabrication allowed us to include different types of bends and optical cavities within the waveguides. Index Terms-Finite-difference time-domain (FDTD) methods, nanooptics, optical device fabrication, photonic bandgap (PBG) materials, photonic crystals (PCS), photonic crystal waveguides.
doi:10.1109/50.887192 fatcat:ali3adz2r5hppjdugvzalcvf3q