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A figure of merit ͑FOM͒ has been developed for focusing quadrupole multiplet lenses for ion microand nanobeam systems. The method which is based on measurement of the central peak of the two-dimensional autocorrelation function of an image provides separate FOM for the horizontal and vertical directions. The approach has been tested by comparison with the edge widths obtained by nonlinear fitting the edge widths of a Ni grid and found to be reliable. The FOM has the important advantage for iondoi:10.1063/1.2827106 fatcat:qpjsyhuxazhjfkiyymdohm5rnu