Highly sensitive piezoresistive sensors based on a voltage divider circuit with TFTs for ultra-low pressure detection

Jiayu Feng, Longlong Chen, Xifeng Li, Jianhua Zhang
2021 IEEE Journal of the Electron Devices Society  
A highly sensitive piezoresistive tactile sensor combined with the thin-film transistors (TFTs) is produced in this letter. The sensor uses two-dimensional Ti3C2-MXenes as piezoresistive material which is one type of transition metal carbide, nitride and/or carbonitride with a lamellar structure. A voltage divider circuit is designed by connecting piezoresistive material with TFT technology. TFT works in the subthreshold and saturation region during the sensing process to ensure that the
more » ... de change of current is measured in a small voltage range. The tactile sensor shows high sensitivity of 4636.1 kPa -1 , ultra-low tactile detection of 0.98 Pa, and extremely durability for 1,500 sensing cycles. Resultantly, the sensor demonstrates excellent potential for electronic touchscreens and advanced medical testing.
doi:10.1109/jeds.2021.3085135 fatcat:4j7c3w65lrh2tdtwpr7i6y4wsi