Image simulation plays an important role in the interpretation of high-resolution scanning transmission electron microscopy (STEM) images and spectroscopy. STEM images are often used as a starting point for structural calculations based on density functional theory (DFT). It is only by comparison of detailed simulation with high-quality experiment that we can confirm the results of these calculations. This is particularly true for localized structures such as interfaces, defects, and grain

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... aries. For example, low level doping can lead to structural distortions that result in contrast changes in mediumangle annular dark field (ADF) STEM images. The use of simulation allows us to differentiate between image contrasts due to small structural changes and other possible causes such as surface contamination. Simulation of electron energy loss spectroscopy (EELS) intensities can be a useful tool for determining the abruptness of interfaces or local vacancy structures. In addition, recent developments in pixelated electron detectors allows the acquisition of scanning diffraction patterns. The role of simulation in the interpretation of these data sets will be discussed. 2680