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Effects of Low Dose Ion Implantation on Minority Carrier Lifetime in Dislocation-Free p-Type Silicon
p型無転位Siのラィフタイムに及ぼす低ドーズイオン打込みの影響
1980
Oyobuturi
p型無転位Siのラィフタイムに及ぼす低ドーズイオン打込みの影響