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Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner
2019
Micromachines
This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism and complete differential coefficient theory, which includes the relationships between three typical errors (hysteresis, machining and measuring errors) and the total positioning error. The
doi:10.3390/mi10080542
pmid:31426503
pmcid:PMC6722792
fatcat:jmzyeby7lvbb3mk4guu34jjdiu