Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors

Yun-Bo Yi
2008 Journal of Micro/Nanolithography  
The design of microstructures with a high quality factor ͑Q value͒ is of significant importance in many microelectromechanical system ͑MEMS͒ applications. Thermoelastic damping can cause an intrinsic energy loss that affects the Q value of high-frequency resonance in those devices such as MEMS mirrors. We deal with the simulation and analysis of thermoelastic damping of MEMS mirrors based on the finite element method. Four designs of MEMS mirrors with different geometric shapes are studied. In
more » ... es are studied. In each model, the dynamic responses of the system subjected to thermoelastic damping are compared to those of the undamped modes. Then we present a systematic parametric study on both the resonant frequency and the Q value as functions of various representative parameters. These results are useful for early prediction of thermoelastic energy loss, not only restricted to the MEMS mirrors but also applicable in more general MEMS resonators and filters design.
doi:10.1117/1.2909274 fatcat:qaxa4a6p4bbjvcwgmsl6g5oqgy