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The design of microstructures with a high quality factor ͑Q value͒ is of significant importance in many microelectromechanical system ͑MEMS͒ applications. Thermoelastic damping can cause an intrinsic energy loss that affects the Q value of high-frequency resonance in those devices such as MEMS mirrors. We deal with the simulation and analysis of thermoelastic damping of MEMS mirrors based on the finite element method. Four designs of MEMS mirrors with different geometric shapes are studied. Indoi:10.1117/1.2909274 fatcat:qaxa4a6p4bbjvcwgmsl6g5oqgy