The digital micromirror device for projection display

G.A. Feather, D.W. Monk
Proceedings IEEE International Conference on Wafer Scale Integration (ICWSI)  
The Digital Micromirror Device is the product of a technological development program which began at Texas Instruments over 15 years ago. It is a micro-electromechanical system, MEMS, device which includes an array of mirrors fabricated above CMOS static RAM memory elements. Rapid switching of the diagonally hinged mirrors allows incident light to be modulated to form the highest quality video images for projection display systems. Recent developments, discussed here, improve the optical and
more » ... tronic performance as well as reduce the required number of active elements. 0-7803-2466-8195 $4.00 01995 IEEE 43
doi:10.1109/icwsi.1995.515437 fatcat:rur2jieejbhwvjenwdocif72cm