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The Structural and Optical Characteristics of Mg0.3Zn0.7O Thin Films Deposited on PES Substrate According to Oxygen Pressure
PES 기판 위에 증착된 Mg0.3Zn0.7O 박막의 산소압에 따른 구조 및 광학적 특성
2014
Journal of the Korean Institute of Electrical and Electronic Material Engineers
PES 기판 위에 증착된 Mg0.3Zn0.7O 박막의 산소압에 따른 구조 및 광학적 특성
MgZnO has attracted a lot of attention for flexible device. In the flexible substrate, the crystal structure of the thin films as well as the surface morphology is not good. Therefore, in this study, we studied on the effects of the oxygen pressure on the structure and crystallinity of Mg0.3Zn0.7O thin films deposited on PES substrate by using pulsed laser deposition. We used X-ray diffraction and atomic force microscopy in order to observe the structural characteristics of Mg0.3Zn0.7O thin
doi:10.4313/jkem.2014.27.11.760
fatcat:k7zgigvhrzhifmilhjzpxdwzqq