The Structural and Optical Characteristics of Mg0.3Zn0.7O Thin Films Deposited on PES Substrate According to Oxygen Pressure
PES 기판 위에 증착된 Mg0.3Zn0.7O 박막의 산소압에 따른 구조 및 광학적 특성

Hyun-Min Lee, Sang-Hyun Kim, Nakwon Jang, Hong-Seung Kim
2014 Journal of the Korean Institute of Electrical and Electronic Material Engineers  
MgZnO has attracted a lot of attention for flexible device. In the flexible substrate, the crystal structure of the thin films as well as the surface morphology is not good. Therefore, in this study, we studied on the effects of the oxygen pressure on the structure and crystallinity of Mg0.3Zn0.7O thin films deposited on PES substrate by using pulsed laser deposition. We used X-ray diffraction and atomic force microscopy in order to observe the structural characteristics of Mg0.3Zn0.7O thin
more » ... s. The crystallinity of Mg0.3Zn0.7O thin films with increasing temperature was improved, Grain size and RMS of the films were increased. UV-visible spectrophotometer was used to get the band gap energy and transmittance. Mg0.3Zn0.7O thin films showed high transmittance over 90% in the visible region. As increased working pressure from 30 mTorr to 200 mTorr, the bandgap energy of Mg0.3Zn0.7O thin film were decreased from 3.59 eV to 3.50 eV.
doi:10.4313/jkem.2014.27.11.760 fatcat:k7zgigvhrzhifmilhjzpxdwzqq