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Nanotube micro-optomechanical actuators
2006
Applied Physics Letters
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In this letter we demonstrate a simple carbon nanotube patterning technique that combines nanotube film bonding, photolithography, and O 2 plasma etching. Well defined carbon nanotube film structures with line widths less than ϳ1.5 m and thickness ranging from 40 to 780 nm were readily fabricated. A micro-optomechanical actuator based on this process has been demonstrated. This patterning process can be utilized for the integration of nanomaterials for wide variety of devices including
doi:10.1063/1.2214148
fatcat:wq6pyn5nj5ahrixginizoepasu