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Transmission X-ray Diffraction from Bismuth Lines Embedded in Silicon
2008
Transactions of the Materials Research Society of Japan
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We have devoted our efforts toward developing transmission X-ray diffraction (TXD) for surface and interface from the viewpoint of realizing more efficient and precise structural analysis than the conventional surface X-ray diffraction. Here, we investigated bismuth lines embedded in a Si(001) substrate, which are promising templates applicable to nanometer-scale device, by TXD. In our experiments with synchrotron X-rays typical one-dimensional diffraction patterns were observed, which
doi:10.14723/tmrsj.33.619
fatcat:dshj3bzdf5h75m4motzf5mdxue