Transmission X-ray Diffraction from Bismuth Lines Embedded in Silicon

Hiroo Tajiri, Wataru Yashiro, Osami Sakata, Kunihiro Sakamoto, Kazushi Miki
2008 Transactions of the Materials Research Society of Japan  
We have devoted our efforts toward developing transmission X-ray diffraction (TXD) for surface and interface from the viewpoint of realizing more efficient and precise structural analysis than the conventional surface X-ray diffraction. Here, we investigated bismuth lines embedded in a Si(001) substrate, which are promising templates applicable to nanometer-scale device, by TXD. In our experiments with synchrotron X-rays typical one-dimensional diffraction patterns were observed, which
more » ... indicates that the bismuth lines are still preserved in interface at the atomic scale.
doi:10.14723/tmrsj.33.619 fatcat:dshj3bzdf5h75m4motzf5mdxue