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CuInSe 2 (CIS) and Cu 0.9 In 0.9 Zn 0.2 Se 2 (CIZS) thin films were deposited by Radio-Frequency (RF) magnetron sputtering process. X-ray diffraction (XRD) results indicate CIZS film deposited at 300℃ (CIZS-300) is (220) preferred orientation which is different from (112) preferred orientation of other films. Cu-poor and appropriate temperature are major factors for (220) preferred orientation of grains. The Raman spectra show a strong peak around 171 cm -1 and a weak peak around 206 cm -1 ,doi:10.15541/jim20140309 fatcat:pvvn4xbvnbhcvpvbfz7h472gva