Micro-tensile tests on micromachined metal on polymer specimens: Elasticity, plasticity and rupture

C. Seguineau, M. Ignat, C. Malhaire, S. Brida, X. Lafontan, J.-M. Desmarres, C. Josserond, L. Debove
2008 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS  
To cite this version: C. Seguineau, M. Ignat, C. Malhaire, S. Brida, X. Lafontan, et al.. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture.
doi:10.1109/dtip.2008.4752941 fatcat:agidudexkrhh5nsd5ir4jcf26i