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Plasma etching of polymeric material and plasma polymerization of monomers were performed by using two types of reactors, which are a tubular type and a gas flow type reactor. Phenomena of deposition and ablation of organic materials in low temperature plasma are discussed in relation to the practical processes.doi:10.1351/pac198557091277 fatcat:czqwtqa6cbgqldtfftjgkbvtoy