Applications of plasma polymerization

S. Morita, Shuzo Hattori
1985 Pure and Applied Chemistry  
Plasma etching of polymeric material and plasma polymerization of monomers were performed by using two types of reactors, which are a tubular type and a gas flow type reactor. Phenomena of deposition and ablation of organic materials in low temperature plasma are discussed in relation to the practical processes.
doi:10.1351/pac198557091277 fatcat:czqwtqa6cbgqldtfftjgkbvtoy