A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is
The Proceedings of the Symposium on Micro-Nano Science and Technology
In this presentation, specially developed mechanical testing techniques for micro-and nano-sized specimens are introduced. For thin films, I have designed and developed uniaxial tension test equipment, in-plane biaxial tension test equipment, and Poisson's ratio measurement equipment to directly measure the mechanical properties used for the design of micro devices. All types of thin films, such as metals, ceramics and polymers, have been successfully evaluated so far. For small structures,doi:10.1299/jsmemnm.2014.6._20am2-f5- fatcat:ab6jjsg3obfefnz4zw25yu7nia