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A Kind of Coating Method of GaN-MOCVD Graphite Susceptor
2013
Journal of Nanomaterials
A novel coating method for the GaN-MOCVD graphite susceptor is proposed in the paper, which means that the upper surface and sides of the graphite susceptor are covered with a low emissivity material coating, and the surface under the susceptor is covered with a high emissivity SiC coating. By using finite element analysis software COMSOL Multiphysics, the temperature field of the susceptors without coating, with common SiC coating, and with improved coating is obtained and compared, which
doi:10.1155/2013/137564
fatcat:axnbg3gi3rdolnvqeapdt647cq