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Analysis and Specificities of Adhesive Forces Between Microscale and Nanoscale
2013
IEEE Transactions on Automation Science and Engineering
Despite a large number of proofs of concept in nanotechnologies (e.g. nanosensors), nano electromechanical systems (NEMS) hardly come to the market. One of the bottlenecks is the packaging of NEMS which require handling, positioning, assembling and joining strategies in the mesoscale (from 100nm to 10µm, between nanoscale and microscale). It requires models of the interaction forces and adhesion forces dedicated to this particular scale. This paper presents several characteristics of the
doi:10.1109/tase.2013.2248150
fatcat:2rzklsruqzeqbado4tptfivmfm