Ultrathin single-crystalline LiNbO3 film bulk acoustic resonator for 5G communication

Zijing Fang, Hao Jin, Shurong Dong, Leihe Lu, Weipeng Xuan, Jikui Luo
2020 Electronics Letters  
This Letter reports a high-performance film bulk acoustic resonator (FBAR) that can be applied in 5G wireless communication. The FBAR has a back-etched free-standing structure using an ultra-thin single-crystalline lithium niobate (LiNbO 3 ) as the piezoelectric film. The thin LiNbO 3 was obtained by the smart cut method and FBARs were fabricated by a standard MEMS process. Owing to the superior bulk-like properties of the single-crystal thin film, the fabricated FBARs have a resonant frequency
more » ... of 5.0 GHz, a quality factor above 1800 and an electromechanical coupling coefficient of 2.66%, demonstrating a promising potential of FBAR filters in 5G and future 6G applications.
doi:10.1049/el.2020.1922 fatcat:6bc7eeigf5b4dossb23zz2ochi