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Ultrathin single-crystalline LiNbO3 film bulk acoustic resonator for 5G communication
This Letter reports a high-performance film bulk acoustic resonator (FBAR) that can be applied in 5G wireless communication. The FBAR has a back-etched free-standing structure using an ultra-thin single-crystalline lithium niobate (LiNbO 3 ) as the piezoelectric film. The thin LiNbO 3 was obtained by the smart cut method and FBARs were fabricated by a standard MEMS process. Owing to the superior bulk-like properties of the single-crystal thin film, the fabricated FBARs have a resonant frequencydoi:10.1049/el.2020.1922 fatcat:6bc7eeigf5b4dossb23zz2ochi