AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Veronika Novotna, Josef Horak, Martin Konecny, Veronika Hegrova, Ondrej Novotny, Zdenek Novacek, Jan Neuman
2020 Microscopy Today  
Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM
more » ... ew. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
doi:10.1017/s1551929520000875 fatcat:nmbz4brbazffjfkuzgvorokksm