A 3D FEM Model for Heat Transfer Mechanisms in Membrane Based Thermal Conductivity Sensors Developed Using SOI CMOS MEMS Technology

Sohab Sarfraz, R. Vasant Kumar, Florin Udrea, S. Zeeshan Ali
2014 Procedia Engineering  
doi:10.1016/j.proeng.2014.11.395 fatcat:khkdydjmqrherabevg55vxo4cq