It is shown by high resolution electron microscopy that coherent plate precipitates with 0.5-1 nrn thickness are formed in Ti-rich Ti-Ni thin films when heat treated directly eom the sputter-deposited amorphous state near the crystallization temperature. The precipitates are Ti-rich and formed on (100) planes of the B2 matrix phase with perfect coherency. The crystal structure of the precipitate is a body centered tetragonal with the oaxis normal to the habit plane. Owing to the existence of

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... se coherent subnanometric precipitates, the parent phase is greatly strengthened, resulting in very excellent shape memory properties such as 6 % recoverable shape memory strain at the stress level of 300 MPa without any appreciable plastic deformation.