Experimental investigations of micromachining characteristics on polydimethylsiloxane (PDMS) by cryogenic micro abrasive jet machining [post]

Guiguan Zhang, Yuli Sun, Hang Gao, Dunwen Zuo
2020 unpublished
In this study, a cryogenic micro-abrasive jet machining (CMAJM) experimental system is designed and built based on the glass transition characteristics of polydimethylsiloxane (PDMS). Fixed processing parameters are then used to evaluate the effectiveness of machining PDMS by micro-abrasive jet machining (MAJM) at room and cryogenic temperatures, and the results show that cryogenic could improves the processing quality of PDMS. Based on this, experiments are conducted into how microchannel
more » ... ssing quality is influenced by the scanning speed and the erosion distance, pressure, and angle. The results show that better PDMS microchannels are processed when the erosion distance is 2.5–3.5 μm, the erosion pressure is 0.4 MPa, the erosion angle is 60–75°, and the scanning speed is 0.25 mm/s.
doi:10.21203/rs.3.rs-132645/v1 fatcat:z7eyzj6o2jcybejofqckrw2xaa