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Electroactive Polymer Actuators and Devices (EAPAD) 2007
We report on the use of the bulge test method to characterize the mechanical properties of miniaturized bucklingmode dielectric elastomer actuators (DEA). Our actuator consists of a Polydimethylsiloxane (PDMS) membrane bonded to a silicon chip with through holes. Compliant electrodes are fabricated on both sides of the membrane by metal ion implantation. The membrane buckles when a critical voltage is applied to the electrodes. The maximum displacements as well as the efficiency of suchdoi:10.1117/12.714944 fatcat:2m2h3nvb3ngtflho2hee3xhj5u