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This brief presents an RF model of an accumulation-mode MOS varactor with physical lumped elements derived from the device structure. The channel resistance was modeled by three resistance components to cover both accumulation and depletion regions with single equivalent circuit. With parameter values obtained by direct extraction, this model could accurately describe characteristics of the device without any optimization steps in the frequency range up to 18 GHz, as well as over a wide biasdoi:10.1109/ted.2003.815599 fatcat:2iuln6cdwzeorengccaygengry