In order to identify organic contaminants in cleanroom air, cleanroom air is passed through an adsorbent which entraps the organic contaminants. The organic contaminants are released from the adsorbent and introduced to a gas chromatography-mass spectrometer (GC-MS). This method enables 0.1μg/m3 level analysis for organic compounds in cleanroom air with the Total Ion Monitoring Mode, and 0.02〝g/ with the Selective Ion Monitoring Mode. Qualitative and quantitative analysis of cyclosiloxanes,

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... phates and phthalates are conducted by the use of standards, i.e., the comparison of retention time of the gas chromatogram and the mass spectrum of each peak. Other organic compounds are identified by the comparison of mass spectrum to the standard mass spectrum data. The peak areas of these organic compounds are converted to the concentrations with toluene calibration curve. Compounds detected are mainly aliphatic hydrocarbons and aromatic hydrocarbons and their dehvatives, siloxanes, phosphates and phthalates. The source of these compounds are mainly the cleanroom itself and the intake air.