Application Of Time Of Flight-Energy Elastic Recoil Detection For Information-Storage Media Analysis

Yanwen Zhang
2003 AIP Conference Proceedings  
The challenge of meeting the ever-increasing demands for elemental profile information with high sensitivity and improved depth resolution has prompted development of sophisticated ion beam analysis methods, including elastic recoil detection analysis (ERDA). In combination with a time of flight (ToF) spectrometry, ToF-E (energy) ERDA has been widely employed as a powerful material analysis tool in a broad range of applications. Thin-film media for magnetic and optical information storage
more » ... ation storage represents one of the most difficult classes of material from an ion beam analysis viewpoint. The suitability of ToF-E ERDA to analyze commercial hard disc, CD-ROM and CD-RW structures has been investigated. A complex Co/Cr/Ni-P/Al multilayer structure taken from a standard hard disc and up to 8 elements in CD samples could be distinguished simultaneously. The results demonstrate the unique power of this technique for characterizing the composition and depth profile of the multi-layers as well as the ingress and influence of foreign species.
doi:10.1063/1.1619743 fatcat:eutvajcsg5dgjpyxvq76772n5e