A Study on Flow Control Method using Spiral Grooved Thrust Dynamic Seal (A Proposition to a Dispenser for Drawing Line with High Quality)
スラスト動圧シールによる微小流量制御方法の研究(連続塗布ディスペンサへの適用検討)

Teruo MARUYAMA, Takashi SONODA
2006 Transactions of the Japan Society of Mechanical Engineers Series C  
doi:10.1299/kikaic.72.607 fatcat:fmvgj6vdjjhlhpm6v3knhsexiu