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Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their sensitivity to force applied to their package. Commonly, differential architectures are employed to cancel commonmode errors, such as the mechanical stress or temperature dependency. The device dependence to mechanical stress was experimentally measured for forces up to 15 N and a reduction of about 5.6 times was obtained on the differentialdoi:10.1109/inertial48129.2020.9090090 fatcat:pv44wrhtgbc4rmneopivieam3m