Subwavelength diffraction gratings with macroscopic moiré patterns generated via Laser Interference Lithography

Andrei USHKOV, Isabelle VERRIER, Thomas Kämpfe, Yves JOURLIN
2020 Optics Express  
We propose a simple and flexible fabrication approach based on the moiré effect of photoresist gratings for rapid synthesis of apodized structures with continuously varying depth. Minor modifications in a standard laser interference lithography setup allow creating macroscopic, visible by naked eye moiré patterns that modulate the depth of subwavelength diffraction gratings. The spatial frequency of this modulation is easily controlled in a wide range, allowing to create a quasicrystal in
more » ... e cases. Experimental results are confirmed by a theory with clear graphical solutions and numerical modeling. The method is universal and does not depend on a specific choice of photoresist and/or substrate materials, making it a promising choice for structured light applications, optical security elements or as a basic structuring method of complex optical devices.
doi:10.1364/oe.386699 pmid:32549468 fatcat:ag2lxwpk3ranfdj4xa5wodfuhi