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Dual-function circular polarization converter for microwave/plasma processing systems
1999
Review of Scientific Instruments
Generation of a uniform density plasma has been a key consideration in the design of microwave/ plasma processing systems. A circularly polarized wave can generate a plasma with good azimuthal uniformity as well as provide strong resonant interaction with the plasma electrons. In this article, we report the development of a three-port polarization converter which efficiently converts the TE 10 wave of a standard rectangular waveguide into a circularly polarized TE 11 wave of a cylindrical
doi:10.1063/1.1149619
fatcat:ec73ng5gbfhg7ayuexxulqbbti