RF NEMS based on carbon nanotubes and graphene

M. Dragoman, G. Konstantinidis, D. Dragoman, D. Neculoiu, A. Cismaru, F. Coccetti, R. Plana, H. Harnagel, A. Kostopoulos, R. Buiculescu
2008 2008 International Semiconductor Conference  
This paper presents RF-NEMS devices (resonators, oscilators and switches) for microwave applications based on carbon nanotube and graphene. We have demonstrated that innovative and cost-effective devices with good performances can be produced combining the NEMS principles and microwave techniques.
doi:10.1109/smicnd.2008.4703339 fatcat:mg4lsrxjl5h4borh6r3dkmtxai