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Dynamic Systems and Control, Parts A and B
Positioning stages using piezoelectric stack actuators (PEA) possess very high theoretical bandwidth and resolution. However, their tracking performance deteriorates as nonlinear dynamics due to inherent hysteresis starts to dominate when the total length of travel increases. When tracking periodic trajectories, which is common in most industrial applications, the uncertain nonlinearity from hysteresis also becomes periodic. Having identified and separated the fast and slow dynamics of thedoi:10.1115/imece2005-81967 fatcat:zkslrxkncfcmbbjdomcdbnnroy