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A methodology to predict shock and vibration levels that could lead to the failure of MEMS devices is reported as a function of vibration frequency and shock pulse duration. A combined experimental-analytical approach is developed, maintaining the simplicity and insightfulness of analytical methods without compromising on the accuracy characteristic of experimental methods. The minimum frequency-dependent acceleration that will lead to surfaces coming into contact, for vibration or shockdoi:10.1088/0960-1317/21/4/045022 fatcat:xlaxdh7l2rebzbfpiotbfwvhty