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Effect of Deposition Parameters on the Properties of Pyrolytic Carbon Deposited by Fluidized-Bed Chemical Vapor Deposition
유동층 화학증착법을 이용하여 증착한 열분해 탄소의 특성에 미치는 증착조건의 영향
2008
Korean Journal of Materials Research
유동층 화학증착법을 이용하여 증착한 열분해 탄소의 특성에 미치는 증착조건의 영향
The properties of pyrolytic carbon (PyC) deposited from C 2 H 2 and a mixture of C 2 H 2 /C 3 H 6 on ZrO 2 particles in a fluidized bed reactor were studied by adjusting the deposition temperature, reactant concentration, and the total gas flow rate. The effect of the deposition parameters on the properties of PyC was investigated by analyzing the microstructure and density change. The density could be varied from 1.0 g/cm 3 to 2.2 g/cm 3 by controlling the deposition parameters. The density
doi:10.3740/mrsk.2008.18.8.406
fatcat:bbnamy4rbzcdbli7e2n7yj27te