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Improved Technology Understanding through Using Process Simulation and Measurements
[chapter]
1993
Simulation of Semiconductor Devices and Processes
Preserved Fulltext
This paper will provide an example for improved technology understanding through a combination of simulation and measurements. Sample mispreparations and design errors coulcl be detected very fast with process simulation, an extremly helpful tool to correla,te physical and electrical measurements.
doi:10.1007/978-3-7091-6657-4_53
fatcat:guwwsui5jfdw3encf7xydfdyu4