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The authors demonstrate the impact of growth kinetics on the surface and structural properties of N-face InN grown by molecular beam epitaxy. Superior surface morphology with step-flow growth features is achieved consistently under In-rich conditions in a low-temperature region of 500-540 degrees C. Remarkably, off-axis x-ray rocking curve (omega scans) widths are found eScholarship provides open access, scholarly publishing services to the University of California and delivers a dynamicdoi:10.1063/1.2335685 fatcat:og6eyxcjgbfffg5l2xceb57jhm