A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2020; you can also visit the original URL.
The file type is application/pdf
.
3D Integration of Sensors and Electronics
2018
Proceedings of The 26th International Workshop on Vertex Detectors — PoS(Vertex 2017)
unpublished
A three dimensional integrated circuit is composed of multiple tiers of integrated electronics and sensors integrated vertically by wafer bonding, thinning and insertion of through-silicon-vias. The technologies associated with three dimensional integrated circuits can provide new capabilities for high energy physics and x-ray imaging experiments. These include finer pixel pitch, lower interconnect capacitance, the ability to separate analog and digital functions, and better power distribution
doi:10.22323/1.309.0025
fatcat:jqurlcfp4rc2ponpboi4jzmvme