Microstructural characterization of porous thin films

B. Djurfors, M.J. Brett, D.G. Ivey
2002 Materials Research Society Symposium Proceedings  
The interest in porous materials has gained lots of attraction in recent years because of their possible applications e.g. for catalyst [1], in biomimetic [2], or solar cells [3]. In general, the functionality of porous materials is given by their microstructure. Therefore, porous metals are also interesting for future applications in microelectronics. A possible application would be to use porous thin films as a metallization within the semiconductor offering tunable elastic, thermal and
more » ... , thermal and electrical properties. With smaller elastic modulus, the metallization layer would exert smaller stress on the device. Another benefit is the increase of specific surface area, therefore thermal management of the device would be better. 348
doi:10.1557/proc-749-w5.4 fatcat:eoklirvgfjcx7hwts3k2yf7t44