Determination of impurities in high-purity silicon nitride by ICP-AES after coprecipitation with lanthanum hydroxide
水酸化ランタン共沈分離/誘導結合プラズマ発光分析法による高純度窒化ケイ素中の不純物の定量

Yoshifumi HARADA, Natsuko KURATA, Giichi FURUNO
1990 Bunseki Kagaku  
doi:10.2116/bunsekikagaku.39.49 fatcat:zz7df33qg5azne2ll4pe55qhkm