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We investigate numerical simulations that utilize a non-linear interdiffusion solver and dynamical x-ray diffraction calculations to predict the local composition evolution in low Ge concentration Si/SiGe superlattices and their diffraction patterns during annealing. Superlattice satellite peak decay rates are compared with experimentally measured values and simulated diffraction patterns are matched directly to data with good success. The simulations are used to test the sensitivity of x-raydoi:10.2172/815275 fatcat:xmmrpf4udzfnxlwhbk3cdxj32e