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Nanotechnology: An Overview and Integration with MEMS
19th IEEE International Conference on Micro Electro Mechanical Systems
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There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, etc. in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors are presented.
doi:10.1109/memsys.2006.1627721
fatcat:cg6yjf4o6nhdvnkto2cphmimfa