Deposition of MoO3 Films from a Volatile Molybdenyl Complex

B. Ballarin, E. Brescacin, G. A. Rizzi, E. Tondello
1995 Journal de Physique IV : Proceedings  
A volatile molybdenyl complex was used as precursor for MOCVD of Moo3 fiIms. Decomposition paths were investigated by thermal analysis. Good quality films were obtained on different substrates and characterized by XPS, UV-Vis, XRD and SEM analyses. The different electronic properties of the various films on different substrates were studied by photoemission experiments and compared with respect to the Moo3 single crystal.
doi:10.1051/jphyscol:1995559 fatcat:moxdb4kulfdtbbknxeoinjwsbq