MEMS Helmholtz coils for magnetic resonance imaging

R R A Syms, M M Ahmad, I R Young, Y Li, J Hand, D Gilderdale
2005 Journal of Micromechanics and Microengineering  
Miniature coils for magnetic resonance imaging and spectroscopy are demonstrated. A rectangular Helmholtz arrangement based on a pair of substrates separated by spherical alignment spacers is investigated. An optimal geometry is developed using simple theory and verified by numerical analysis. Prototypes are fabricated using silicon substrates shaped by anisotropic etching to form a trough to hold an internal sample and pits for use as alignment features, and carrying Cu/Au conductors
more » ... onductors fabricated by electroplating. Q values of 11 are obtained, and devices containing an internal proton source are developed for use as fiducial markers in 1 H magnetic resonance imaging at 1.5 T. Magnetic resonance spectroscopy is also performed on the internal source, with a SNR of ≈85.
doi:10.1088/0960-1317/15/7/001 fatcat:ww2txv3zafhizhuwwu66lbxpou