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MEMS Helmholtz coils for magnetic resonance imaging
2005
Journal of Micromechanics and Microengineering
Miniature coils for magnetic resonance imaging and spectroscopy are demonstrated. A rectangular Helmholtz arrangement based on a pair of substrates separated by spherical alignment spacers is investigated. An optimal geometry is developed using simple theory and verified by numerical analysis. Prototypes are fabricated using silicon substrates shaped by anisotropic etching to form a trough to hold an internal sample and pits for use as alignment features, and carrying Cu/Au conductors
doi:10.1088/0960-1317/15/7/001
fatcat:ww2txv3zafhizhuwwu66lbxpou