Fourier Deconvolution of Electron Energy-Loss Spectra

R. F. Egerton, B. G. Williams, T. G. Sparrow
1985 Proceedings of the Royal Society A  
Electron energy-loss spectroscopy (e.e.l.s.) performed with an electron microscope can be used to obtain plasmon spectra, near-edge fine structure and extended electron energy-loss fine structure (ex.e.l.f.s.), as well as to do chemical analysis on truly microscopic samples. However, the very strength of the electron-electron interaction gives rise to significant and sometimes predom inant plural scattering effects. To obtain consistent and reliable estim ates of the single scattering distri
more » ... cattering distri butions these effects m ust be accounted for. In this paper, two Fouriertransform deconvolution methods of removing plural scattering from electron energy-loss spectra and their im plem entation on a microcomputer, are discussed. Their relative advantages and lim itations are considered together with examples of artefacts th a t may arise in both plasmon and core-loss spectra. As a result of deconvolution the sensitivity and accuracy of core-elemental analysis is enhanced but, more im portantly, it is possible to obtain reproducible near-edge structure and plasmon spectra from relatively thick samples th a t would otherwise not be suitable for investigation by means of e.e.l.s. t Permanent address: Physics Department, University of Alberta, Edmonton Canada T6G 2J 1. r 395 1
doi:10.1098/rspa.1985.0041 fatcat:m6m6nhdbindzdo2sv2sfnnklce