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GREEN'S FUNCTION FOR THE EVALUATION OF ANCHOR LOSSES IN MEMS
2016
Proceedings of the VII European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS Congress 2016)
unpublished
Preserved Fulltext
The issue of dissipation has a peculiar importance in micro-electro-mechanicalstructures (MEMS). Among the sources of damping that affect their performance, the most relevant are [1]: thermoelastic coupling, air damping, intrinsic material losses, electrical loading due to electrode routing, anchor losses. Moreover, recent experimental results indicate the presence of additional temperature dependent dissipation mechanisms which are not yet fully understood (see e.g. [2, 12] ). In a resonating structure the quality factor Q is defined as:
doi:10.7712/100016.2024.6472
fatcat:37ap7oo4gzbw5eceul3fiye7se