Frequency Domain Based Measurement Method for the Thermal Parameters of a Thin-film Diaphragm Embedded in a MEMS Multi-parameter Wind Sensor

R. Beigelbeck, D. Reyes-Romero, S. Cerimovic, F. Kohl, T. Voglhuber-Brunnmaier, B. Jakoby, G.A. Urban
2014 Procedia Engineering  
doi:10.1016/j.proeng.2014.11.568 fatcat:bb3xjdydqbgmbdeasjxdqhntiq